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Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Physica Status Solidi: Rapid Research Letters, Volume 7, issue 11, pp. 950-954
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Repo, P, Benick, J, von Gastrow, G, Vähänissi, V, Heinz, F D, Schön, J, Schubert, M C & Savin, H 2013, 'Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide', Physica Status Solidi: Rapid Research Letters, vol. 7, no. 11, pp. 950-954. https://doi.org/10.1002/pssr.201308096