Microelectromechanical Systems (MEMS) Resonators: Design for Yield Optimization
| dc.contributor | Aalto-yliopisto | fi |
| dc.contributor | Aalto University | en |
| dc.contributor.advisor | Sage, Eric | |
| dc.contributor.author | Ali, Arsam | |
| dc.contributor.school | Sähkötekniikan korkeakoulu | fi |
| dc.contributor.supervisor | Vuorinen, Vesa | |
| dc.date.accessioned | 2023-09-03T17:10:03Z | |
| dc.date.available | 2023-09-03T17:10:03Z | |
| dc.date.issued | 2023-08-21 | |
| dc.description.abstract | The electronics industry has witnessed remarkable technological advancements, with electronic circuits playing a crucial role in computing and sensing applications. At the core of these circuits, precise timing devices synchronize operations for optimal performance. In recent years, MEMS resonators have emerged as a promising alternative to traditional quartz-based crystal oscillators, offering advantages like miniaturization potential, cost-effectiveness, and seamless integration with integrated circuit (IC) technology. In the case of MEMS-based timing resonators, stable frequency output is one of the core performance metrics. Operating them at higher drive levels can result in frequency modulation and unpredictable shifts. In severe cases, increasing the input drive level can lead to frequency collapse, rendering the resonator ineffective. The frequency collapse phenomenon in resonator devices is attributed to the presence of spurious crossings in proximity to the main resonance mode. These crossings' positions are directly influenced by resonator geometry and layer thickness. Given inherent non-uniformities during fabrication processes, causing variations in geometry and layer thickness across the wafer, specific regions may exhibit the frequency collapse phenomenon, potentially impacting wafer yield. To enhance the stability of MEMS timing resonators, a comprehensive approach was employed, integrating thin-film characterization, finite-element method (FEM) simulations, and design optimization. Process control monitors (PCMs) identified fabrication process windows, enabling evaluation of yield-impacting parameters such as material thickness, stress, misalignment, and critical dimensions biases. Through simulations in COMSOL, resonators were designed with the most separation of main resonance mode to spurious crossings within the fabrication window. Electrical characterization tested the optimized designs, assessing frequency waveform collapse via applying higher drive levels. | en |
| dc.format.extent | 67 | |
| dc.identifier.uri | https://aaltodoc.aalto.fi/handle/123456789/123219 | |
| dc.identifier.urn | URN:NBN:fi:aalto-202309035556 | |
| dc.language.iso | en | en |
| dc.location | P1 | fi |
| dc.programme | Master’s Programme in Smart Systems Integrated Solutions (Erasmus Mundus) | fi |
| dc.programme.major | Cyber-physical Systems | fi |
| dc.programme.mcode | ELEC3064 | fi |
| dc.subject.keyword | timing devices | en |
| dc.subject.keyword | MEMS resonators | en |
| dc.subject.keyword | frequency collapse | en |
| dc.subject.keyword | drive level dependency | en |
| dc.title | Microelectromechanical Systems (MEMS) Resonators: Design for Yield Optimization | en |
| dc.type | G2 Pro gradu, diplomityö | fi |
| dc.type.ontasot | Master's thesis | en |
| dc.type.ontasot | Diplomityö | fi |
| local.aalto.electroniconly | yes | |
| local.aalto.openaccess | no |
