Surface Passivated Black Silicon Photodetectors with Induced Junction

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Volume Title
Sähkötekniikan korkeakoulu | Master's thesis
Ask about the availability of the thesis by sending email to the Aalto University Learning Centre oppimiskeskus@aalto.fi
Date
2015-06-10
Department
Major/Subject
Micro and Nanotechnology
Mcode
S3010
Degree programme
EST - Master’s Programme in Micro and Nanotechnology
Language
en
Pages
55+0
Series
Description
Supervisor
Savin, Hele
Thesis advisor
Juntunen, Mikko
Repo, Paivikki
Keywords
black silicon, photodetectors, induced junction, surface passivation, aluminum oxide, ALD
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