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Micromechanical actuation of mirrors

Helsinki University of Technology | Master's thesis

Electronic archive copy is available via Aalto Thesis Database.

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Date

Department

Teknillisen fysiikan ja matematiikan osasto

Major/Subject

Materiaalifysiikka

Mcode

Tfy-44

Language

en

Pages

53

Supervisor

Kaivola, Matti

Thesis advisor

Äyräs, Pekka

Keywords

MOEMS, MOEMS, micromirror, mikropeilit, micromechanics, mikromekaniikka, SOI, SOI, optical switch, optinen kytkin

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-2020120447847

Collections

[dipl] Teknillinen korkeakoulu / TKK

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