Preparation of aluminium nitride on porous silica and alumina

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Licentiate thesis
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Date
2000
Major/Subject
Teknillinen kemia
Mcode
Kem-40
Degree programme
Language
en
Pages
27 s. + liitt.
Series
Description
Supervisor
Krause, Outi
Thesis advisor
Lindblad, Marina
Keywords
aluminium nitride, alumiininitridi, trimethylaluminium, trimetyylialumiini, ammonia, ammoniakki, chemisorption, kemisorptio, IR, , NMR, ALD
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