Heat treatment of copper-doped tetrahedral amorphous carbon thin films
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URL
Journal Title
Journal ISSN
Volume Title
Kemian tekniikan korkeakoulu |
Master's thesis
Authors
Date
2019-05-07
Department
Major/Subject
Functional Materials
Mcode
CHEM3025
Degree programme
Master's Programme in Chemical, Biochemical and Materials Engineering
Language
en
Pages
55 + 14
Series
Description
Supervisor
Koskinen, JariThesis advisor
Etula, JarkkoKeywords
ta-C, DLC, copper, sensor applications