Characterization of thin film adhesion by MEMS shaft-loading blister testing

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorBerdova, Mariaen_US
dc.contributor.authorLyytinen, Jussien_US
dc.contributor.authorGrigoras, Kestutien_US
dc.contributor.authorBaby, Anuen_US
dc.contributor.authorKilpi, Laurien_US
dc.contributor.authorRonkainen, Helenaen_US
dc.contributor.authorFranssila, Samien_US
dc.contributor.authorKoskinen, Jarien_US
dc.contributor.departmentDepartment of Materials Science and Engineeringen
dc.contributor.departmentAalto Nanofaben
dc.contributor.departmentDepartment of Chemistry and Materials Scienceen
dc.date.accessioned2016-09-16T07:34:44Z
dc.date.issued2013en_US
dc.description.versionPeer revieweden
dc.format.extent5
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationBerdova, M, Lyytinen, J, Grigoras, K, Baby, A, Kilpi, L, Ronkainen, H, Franssila, S & Koskinen, J 2013, 'Characterization of thin film adhesion by MEMS shaft-loading blister testing', Journal of Vacuum Science and Technology A, vol. 31, no. 3, 031102, pp. 1-5. https://doi.org/10.1116/1.4801921en
dc.identifier.doi10.1116/1.4801921en_US
dc.identifier.issn0734-2101
dc.identifier.issn1520-8559
dc.identifier.otherPURE UUID: eb86f156-1316-487f-9ace-4adc7f492334en_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/eb86f156-1316-487f-9ace-4adc7f492334en_US
dc.identifier.otherPURE LINK: http://dx.doi.org/10.1116/1.4801921en_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/6323993/Berdova_lyytinen_et_al_10_1116_1_4801921.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/21944
dc.identifier.urnURN:NBN:fi:aalto-201609163825
dc.language.isoenen
dc.publisherAVS Science and Technology Society
dc.relation.ispartofseriesJournal of Vacuum Science and Technology Aen
dc.relation.ispartofseriesVolume 31, issue 3, pp. 1-5en
dc.rightsopenAccessen
dc.subject.keywordadhesionen_US
dc.subject.keywordatomic layer depositionen_US
dc.subject.keywordshaft-loading blister testen_US
dc.subject.keywordthin filmsen_US
dc.titleCharacterization of thin film adhesion by MEMS shaft-loading blister testingen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion

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[article-cris] Kemian tekniikan korkeakoulu / CHEM