Characterization of thin film adhesion by MEMS shaft-loading blister testing

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorBerdova, Maria
dc.contributor.authorLyytinen, Jussi
dc.contributor.authorGrigoras, Kestuti
dc.contributor.authorBaby, Anu
dc.contributor.authorKilpi, Lauri
dc.contributor.authorRonkainen, Helena
dc.contributor.authorFranssila, Sami
dc.contributor.authorKoskinen, Jari
dc.contributor.departmentDepartment of Materials Science and Engineering
dc.contributor.departmentDepartment of Chemistry and Materials Scienceen
dc.date.accessioned2016-09-16T07:34:44Z
dc.date.issued2013
dc.description.versionPeer revieweden
dc.format.extent5
dc.format.extent1-5
dc.format.mimetypeapplication/pdf
dc.identifier.citationBerdova , M , Lyytinen , J , Grigoras , K , Baby , A , Kilpi , L , Ronkainen , H , Franssila , S & Koskinen , J 2013 , ' Characterization of thin film adhesion by MEMS shaft-loading blister testing ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 31 , no. 3 , 031102 , pp. 1-5 . https://doi.org/10.1116/1.4801921en
dc.identifier.doi10.1116/1.4801921
dc.identifier.issn0734-2101
dc.identifier.issn1520-8559
dc.identifier.otherPURE UUID: eb86f156-1316-487f-9ace-4adc7f492334
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/eb86f156-1316-487f-9ace-4adc7f492334
dc.identifier.otherPURE LINK: http://dx.doi.org/10.1116/1.4801921
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/6323993/Berdova_lyytinen_et_al_10_1116_1_4801921.pdf
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/21944
dc.identifier.urnURN:NBN:fi:aalto-201609163825
dc.language.isoenen
dc.relation.ispartofseriesJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY Aen
dc.relation.ispartofseriesVolume 31, issue 3en
dc.rightsopenAccessen
dc.subject.keywordadhesion
dc.subject.keywordatomic layer deposition
dc.subject.keywordshaft-loading blister test
dc.subject.keywordthin films
dc.titleCharacterization of thin film adhesion by MEMS shaft-loading blister testingen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion
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