Characterization of thin film adhesion by MEMS shaft-loading blister testing

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Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2013
Major/Subject
Mcode
Degree programme
Language
en
Pages
5
1-5
Series
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 31, issue 3
Description
Keywords
adhesion, atomic layer deposition, shaft-loading blister test, thin films
Other note
Citation
Berdova , M , Lyytinen , J , Grigoras , K , Baby , A , Kilpi , L , Ronkainen , H , Franssila , S & Koskinen , J 2013 , ' Characterization of thin film adhesion by MEMS shaft-loading blister testing ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 31 , no. 3 , 031102 , pp. 1-5 . https://doi.org/10.1116/1.4801921