Characterization of thin film adhesion by MEMS shaft-loading blister testing
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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en
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5
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Journal of Vacuum Science and Technology A, Volume 31, issue 3, pp. 1-5
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Berdova, M, Lyytinen, J, Grigoras, K, Baby, A, Kilpi, L, Ronkainen, H, Franssila, S & Koskinen, J 2013, 'Characterization of thin film adhesion by MEMS shaft-loading blister testing', Journal of Vacuum Science and Technology A, vol. 31, no. 3, 031102, pp. 1-5. https://doi.org/10.1116/1.4801921