Low-loss titanium dioxide strip waveguides by atomic layer deposition

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorRoussey, Matthieuen_US
dc.contributor.authorHäyrinen, Markusen_US
dc.contributor.authorSäynätjoki, Anttien_US
dc.contributor.authorGandhi, Vishalen_US
dc.contributor.authorKarvonen, Lasseen_US
dc.contributor.authorStenberg, Petrien_US
dc.contributor.authorKuittinen, Markkuen_US
dc.contributor.authorHonkanen, Seppoen_US
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.editorJ. F. Digonnet, Michelen_US
dc.contributor.editorJiang, Shibinen_US
dc.date.accessioned2018-12-10T10:12:20Z
dc.date.available2018-12-10T10:12:20Z
dc.date.issued2014en_US
dc.description.versionNon peer revieweden
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationRoussey, M, Häyrinen, M, Säynätjoki, A, Gandhi, V, Karvonen, L, Stenberg, P, Kuittinen, M & Honkanen, S 2014, Low-loss titanium dioxide strip waveguides by atomic layer deposition. in M J. F. Digonnet & S Jiang (eds), SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014., UNSP 89820E, Proceedings of SPIE, vol. 8982, SPIE. https://doi.org/10.1117/12.2038912en
dc.identifier.doi10.1117/12.2038912en_US
dc.identifier.isbn978-0-8194-9895-3
dc.identifier.issn0277-786X
dc.identifier.otherPURE UUID: 25b84313-ea8d-43cc-8f4f-a1769b019650en_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/25b84313-ea8d-43cc-8f4f-a1769b019650en_US
dc.identifier.otherPURE LINK: http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1845616en_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/29252939/89820E.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/34961
dc.identifier.urnURN:NBN:fi:aalto-201812105976
dc.language.isoenen
dc.relation.ispartofseriesSPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014en
dc.relation.ispartofseriesProceedings of SPIE ; Volume 8982en
dc.rightsopenAccessen
dc.titleLow-loss titanium dioxide strip waveguides by atomic layer depositionen
dc.typeA4 Artikkeli konferenssijulkaisussafi
dc.type.versionpublishedVersion

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