Low-loss titanium dioxide strip waveguides by atomic layer deposition
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A4 Artikkeli konferenssijulkaisussa
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2014
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en
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SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014, Proceedings of SPIE ; Volume 8982
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Roussey, M, Häyrinen, M, Säynätjoki, A, Gandhi, V, Karvonen, L, Stenberg, P, Kuittinen, M & Honkanen, S 2014, Low-loss titanium dioxide strip waveguides by atomic layer deposition . in M J. F. Digonnet & S Jiang (eds), SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014 ., UNSP 89820E, Proceedings of SPIE, vol. 8982, SPIE . https://doi.org/10.1117/12.2038912