Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

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Journal Title
Journal ISSN
Volume Title
School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2012
Major/Subject
Mcode
Degree programme
Language
en
Pages
013503
Series
Applied Physics Letters, Volume 100, Issue 1
Abstract
We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedancemeasurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors. 
Description
Keywords
microelectromechanical resonators, MEMS resonators, frequency splitting, frequency scaling, square-extensional (SE) mode, vibration mode, plate size
Other note
Citation
Lipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance. Applied Physics Letters. Volume 100, Issue 1. 013503. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3673558.