Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

dc.contributorAalto Universityen
dc.contributor.authorLipiäinen, Lauri
dc.contributor.authorJaakkola, Antti
dc.contributor.authorKokkonen, Kimmo
dc.contributor.authorKaivola, Matti
dc.contributor.departmentTeknillisen fysiikan laitosfi
dc.contributor.departmentDepartment of Applied Physicsen
dc.contributor.schoolPerustieteiden korkeakoulufi
dc.contributor.schoolSchool of Scienceen
dc.description.abstractWe present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanicalresonator, actuated with a piezoelectricAlNthin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.en
dc.description.versionPeer revieweden
dc.identifier.citationLipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. Applied Physics Letters. Volume 100, Issue 15. 153508. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3703119.en
dc.identifier.issn1077-3118 (electronic)
dc.identifier.issn0003-6951 (printed)
dc.publisherAIP Publishingen
dc.relation.ispartofseriesApplied Physics Lettersen
dc.relation.ispartofseriesVolume 100, Issue 15
dc.rights© 2012 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
dc.rights.holderAmerican Intitute of Physics (AIP)
dc.subject.keywordmicroelectromechanical resonatorsen
dc.subject.keywordMEMS resonatorsen
dc.subject.keywordsilicon resonatorsen
dc.subject.keywordacoustic behavioren
dc.subject.keywordsquare-extensional (SE) modeen
dc.subject.keywordvibration fieldsen
dc.titleNonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonatoren
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionFinal published versionen
Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
2.07 MB
Adobe Portable Document Format