Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorLipiäinen, Lauri
dc.contributor.authorJaakkola, Antti
dc.contributor.authorKokkonen, Kimmo
dc.contributor.authorKaivola, Matti
dc.contributor.departmentTeknillisen fysiikan laitosfi
dc.contributor.departmentDepartment of Applied Physicsen
dc.contributor.schoolPerustieteiden korkeakoulufi
dc.contributor.schoolSchool of Scienceen
dc.date.accessioned2015-04-28T09:43:56Z
dc.date.available2015-04-28T09:43:56Z
dc.date.issued2012
dc.description.abstractWe present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanicalresonator, actuated with a piezoelectricAlNthin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.en
dc.description.versionPeer revieweden
dc.format.extent153508
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. Applied Physics Letters. Volume 100, Issue 15. 153508. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3703119.en
dc.identifier.doi10.1063/1.3703119
dc.identifier.issn1077-3118 (electronic)
dc.identifier.issn0003-6951 (printed)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/15789
dc.identifier.urnURN:NBN:fi:aalto-201504272450
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.ispartofseriesApplied Physics Lettersen
dc.relation.ispartofseriesVolume 100, Issue 15
dc.rights© 2012 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/aplen
dc.rights.holderAmerican Intitute of Physics (AIP)
dc.subject.keywordmicroelectromechanical resonatorsen
dc.subject.keywordMEMS resonatorsen
dc.subject.keywordsilicon resonatorsen
dc.subject.keywordacoustic behavioren
dc.subject.keywordsquare-extensional (SE) modeen
dc.subject.keywordvibration fieldsen
dc.subject.otherPhysicsen
dc.titleNonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonatoren
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.dcmitypetexten
dc.type.versionFinal published versionen
Files
Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
A1_lipiäinen_lauri_2012.pdf
Size:
2.07 MB
Format:
Adobe Portable Document Format