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Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator
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© 2012 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/apl
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School of Science |
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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en
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153508
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Applied Physics Letters, Volume 100, Issue 15
Abstract
We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanicalresonator, actuated with a piezoelectricAlNthin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.
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Lipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. Applied Physics Letters. Volume 100, Issue 15. 153508. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3703119.