Nickel: A very fast diffuser in silicon

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorLindroos, Jeanette
dc.contributor.authorFenning, David P.
dc.contributor.authorBacklund, Daniel J.
dc.contributor.authorVerlage, Erik
dc.contributor.authorGorgulla, Angelika
dc.contributor.authorEstreicher, Stefan K.
dc.contributor.authorSavin, Hele
dc.contributor.authorBuonassisi, Tonio
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.groupauthorHele Savin Groupen
dc.date.accessioned2025-10-08T06:23:18Z
dc.date.available2025-10-08T06:23:18Z
dc.date.issued2013
dc.descriptionVK: T40310
dc.description.versionPeer revieweden
dc.format.mimetypeapplication/pdf
dc.identifier.citationLindroos, J, Fenning, D P, Backlund, D J, Verlage, E, Gorgulla, A, Estreicher, S K, Savin, H & Buonassisi, T 2013, 'Nickel: A very fast diffuser in silicon', Journal of Applied Physics, vol. 113, no. 20. https://doi.org/10.1063/1.4807799en
dc.identifier.doi10.1063/1.4807799
dc.identifier.issn0021-8979
dc.identifier.issn1089-7550
dc.identifier.otherPURE UUID: 1683251e-75d4-4d80-beba-63e2f436d796
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/1683251e-75d4-4d80-beba-63e2f436d796
dc.identifier.otherPURE LINK: http://jap.aip.org/resource/1/japiau/v113/i20/p204906_s1
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/7392988/savin_nickel_a_very_2013.pdf
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/139404
dc.identifier.urnURN:NBN:fi:aalto-202510087585
dc.language.isoenen
dc.publisherAmerican Institute of Physics
dc.relation.ispartofseriesJournal of Applied Physicsen
dc.relation.ispartofseriesVolume 113, issue 20en
dc.rightsopenAccessen
dc.subject.keywordab initio calculations
dc.subject.keyworddiffusion
dc.subject.keywordelemental semiconductors
dc.subject.keywordextrapolation
dc.subject.keywordnickel
dc.subject.keywordsilicon
dc.titleNickel: A very fast diffuser in siliconen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion

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