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Nickel: A very fast diffuser in silicon

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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

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en

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Journal of Applied Physics, Volume 113, issue 20

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VK: T40310

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Lindroos, J, Fenning, D P, Backlund, D J, Verlage, E, Gorgulla, A, Estreicher, S K, Savin, H & Buonassisi, T 2013, 'Nickel: A very fast diffuser in silicon', Journal of Applied Physics, vol. 113, no. 20. https://doi.org/10.1063/1.4807799

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