LDNMOS-transistorin kehittäminen BeCMOS-prosessiin
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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Diplomityö
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Instructions for the author
Author
Date
2002
Department
Materiaali- ja kalliotekniikan osasto
Major/Subject
Elektroniikan valmistustekniikka
Mcode
S-113
Degree programme
Language
fi
Pages
84
Series
Description
Supervisor
Kivilahti, JormaKeywords
LDNMOS, LDNMOS, DMOS, DMOS, BeCMOS, BeCMOS, double diffusion, kaksoisdiffuusio, molybdenum gate, molybdeenihila, simulation, simulointi, transistor, transistori
