Mechanical behaviour of diamond-like carbon film in microsystems
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Journal Title
Journal ISSN
Volume Title
School of Chemical Engineering |
Master's thesis
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Instructions for the author
Instructions for the author
Author
Date
2012
Department
Major/Subject
Materiaalitiede
Mcode
MT-45
Degree programme
Language
en
Pages
76 s. + liitt. 16
Series
Description
Supervisor
Franssila, SamiThesis advisor
Kilpinen, PetteriKeywords
amorphous carbon, timantinkaltainen hiili, diamond-like carbon, DLC, microsystems, MEMS
