Mechanical behaviour of diamond-like carbon film in microsystems

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Journal Title

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Volume Title

School of Chemical Engineering | Master's thesis
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Date

2012

Major/Subject

Materiaalitiede

Mcode

MT-45

Degree programme

Language

en

Pages

76 s. + liitt. 16

Series

Description

Supervisor

Franssila, Sami

Thesis advisor

Kilpinen, Petteri

Keywords

amorphous carbon, timantinkaltainen hiili, diamond-like carbon, DLC, microsystems, MEMS

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Citation