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(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon
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Vähänissi, V, Haarahiltunen, A, Yli-Koski, M, Talvitie, H, Asghar, M I & Savin, H 2009, '(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon', Conference on Gettering and Defect Engineering in Semiconductor Technology, Berlin, Germany, 26/09/2009 - 02/10/2009.