Thin Films of Rare Eath Oxides by Atomic Layer Deposition

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Licentiate thesis
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Date
2003
Major/Subject
Epäorgaaninen kemia
Mcode
Kem-35
Degree programme
Language
en
Pages
ix + 56 s. + liitt.
Series
Description
Supervisor
Niinistö, Lauri
Thesis advisor
Putkonen, Matti
Keywords
Other note
Citation