Effects of alloy composition and Si-doping on vacancy defect formation in (InxGa1- x)2O3 thin films

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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2018-03-28
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Language
en
Pages
1-6
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Journal of Applied Physics, Volume 123, issue 12
Abstract
Various nominally undoped and Si-doped (InxGa1- x)2O3 thin films were grown by pulsed laser deposition in a continuous composition spread mode on c-plane α-sapphire and (100)-oriented MgO substrates. Positron annihilation spectroscopy in the Doppler broadening mode was used as the primary characterisation technique in order to investigate the effect of alloy composition and dopant atoms on the formation of vacancy-type defects. In the undoped samples, we observe a Ga2O3-like trend for low indium concentrations changing to In2O3-like behaviour along with the increase in the indium fraction. Increasing indium concentration is found to suppress defect formation in the undoped samples at [In] > 70 at. %. Si doping leads to positron saturation trapping in VIn-like defects, suggesting a vacancy concentration of at least mid-1018 cm-3 independent of the indium content.
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Prozheeva , V , Hölldobler , R , Von Wenckstern , H , Grundmann , M & Tuomisto , F 2018 , ' Effects of alloy composition and Si-doping on vacancy defect formation in (In x Ga 1- x ) 2 O 3 thin films ' , Journal of Applied Physics , vol. 123 , no. 12 , 125705 , pp. 1-6 . https://doi.org/10.1063/1.5022245