CMOS Integrated Optics - Studies on Submicron Waveguide Mode Properties and Devices

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.advisorSäynätjoki, Antti, Dr., Aalto University, Department of Micro and Nanosciences, Finland
dc.contributor.authorKhanna, Amit
dc.contributor.departmentMikro- ja nanotekniikan laitosfi
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.labNanotechnology Groupen
dc.contributor.schoolSähkötekniikan korkeakoulufi
dc.contributor.schoolSchool of Electrical Engineeringen
dc.contributor.supervisorLipsanen, Harri, Prof., Aalto University, Department of Micro and Nanosciences, Finland
dc.contributor.supervisorHonkanen, Seppo, Prof., University of Eastern Finland, Institute of Photonics, Finland
dc.date.accessioned2015-06-02T11:26:35Z
dc.date.available2015-06-02T11:26:35Z
dc.date.defence2015-06-05
dc.date.issued2015
dc.description.abstractThe aim of this thesis is to demonstrate novel or improved photonic devices based on the CMOS based photonics processes. Methods to obtain application-specific optical mode characteristics through design, fabrication and post-processing are proposed. Focus is on devices attainable within the capabilities of 130 nm CMOS node tool-set, thereby ensuring manufacturability of photonic devices studied in this thesis. Compared to the widely studied 1D polarization sensitive slot waveguides, we demonstrate novel designs for 2D slot waveguides with high confinement for both polarizations of the fundamental optical mode (quasi-TE and quasi-TM). It is shown that on the basis of required optical mode characteristics such as effective index, birefringence, confinement and mode overlap; cross-slot waveguide, closed 2D slot waveguide, open 2D slot waveguide or u-slot waveguide can be used. It is also shown that angled sidewall in vertical slot waveguide aides void-less filling of the narrow vertical slot waveguide and enhances interaction with the non-linear slot. Asymmetric vertical slot waveguides to achieve non-reciprocal phase shift are also discussed. Furthermore, unprecedented reduction of optical propagation loss is demonstrated for the shorter wavelength regime (980 nm) in the CMOS based silicon nitride material system. This is realized through CMOS compatible ALD based wafer-scale post-processing technique.en
dc.format.extent68 + app. 46
dc.format.mimetypeapplication/pdfen
dc.identifier.isbn978-952-60-6225-9 (electronic)
dc.identifier.isbn978-952-60-6224-2 (printed)
dc.identifier.issn1799-4942 (electronic)
dc.identifier.issn1799-4934 (printed)
dc.identifier.issn1799-4934 (ISSN-L)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/16425
dc.identifier.urnURN:ISBN:978-952-60-6225-9
dc.language.isoenen
dc.opnMelloni, Andrea, Prof., Politecnico di Milano, Italy
dc.publisherAalto Universityen
dc.publisherAalto-yliopistofi
dc.relation.haspart[Publication 1]: Khanna Amit, Säynätjoki Antti, Tervonen Ari, Honkanen Seppo. Control of Optical Mode Properties in Cross-slot Waveguides. Applied Optics, Volume 48, Number 34, pages 6547-6552, December 2009. DOI: 10.1364/AO.48.006547
dc.relation.haspart[Publication 2]: Khanna Amit, Säynätjoki Antti, Tervonen Ari, Norwood Robert A., Honkanen Seppo. Polarization Properties of Two-Dimensional Slot Waveguides. Applied Optics, Volume 49, Number 28, pages 5321-5332, October 2010. DOI: 10.1364/AO.49.005321
dc.relation.haspart[Publication 3]: Säynätjoki Antti, Alasaarela Tapani, Khanna Amit, Karvonen Lasse, Stenberg Petri, Kuittinen Markku, Tervonen Ari, Honkanen Seppo. Angled Sidewalls in Slot Waveguides: Conformal Filling and Mode Properties. Optics Express, Volume 17, Issue 23, pages 21066-21076, October 2009. DOI: 10.1364/OE.17.021066
dc.relation.haspart[Publication 4]: Tervonen Ari, Khanna Amit, Säynätjoki Antti, Honkanen Seppo. Modeling Study of Non-reciprocal Phase Shift in Magneto-optic Asymmetric Slot Waveguides. Journal of Lightwave Technology, Volume 29, Number 5, pages 656-660, March 2011. DOI: 10.1109/JLT.2011.2107032
dc.relation.haspart[Publication 5]: Khanna Amit, Subramanian Ananth Z, Häyrinen Markus, Selvaraja Shankar, Verheyen Peter, Thourhout Dries Van, Honkanen Seppo, Lipsanen Harri, Baets Roel. Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-nearinfrared wavelengths. Optics Express, Volume 22, Number 5, pages 5684-5692, March 2014. DOI: 10.1364/OE.22.005684
dc.relation.ispartofseriesAalto University publication series DOCTORAL DISSERTATIONSen
dc.relation.ispartofseries74/2015
dc.revPelli, Stefano, Dr., CNR, Italy
dc.revHiltunen, Jussi, Dr., VTT Technical Research Centre of Finland, Finland
dc.subject.keywordintegrated opticsen
dc.subject.keywordphotonicsen
dc.subject.keywordwaveguideen
dc.subject.keywordnanophotonicsen
dc.subject.keywordsilicon photonicsen
dc.subject.keywordCMOS photonicsen
dc.subject.keywordwaveguidesen
dc.subject.keywordslot waveguideen
dc.subject.otherElectrical engineeringen
dc.titleCMOS Integrated Optics - Studies on Submicron Waveguide Mode Properties and Devicesen
dc.typeG5 Artikkeliväitöskirjafi
dc.type.dcmitypetexten
dc.type.ontasotDoctoral dissertation (article-based)en
dc.type.ontasotVäitöskirja (artikkeli)fi
local.aalto.archiveyes
local.aalto.digiauthask
local.aalto.digifolderAalto_64551
local.aalto.formfolder2015_06_02_klo_10_34
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