Mikromekaanisen kiihtyvyysanturielementin taajuusvastemittauksen kehittäminen
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Journal Title
Journal ISSN
Volume Title
School of Science |
Master's thesis
Checking the digitized thesis and permission for publishing
Instructions for the author
Instructions for the author
Author
Date
2013
Department
Major/Subject
Fysiikka
Mcode
Tfy-3
Degree programme
Language
fi
Pages
[7] + 61
Series
Description
Supervisor
Sillanpää, MikaThesis advisor
Partanen, MikkoKeywords
MEMS, MEMS, accelerometer, kiihtyvyysanturi, frequency response, taajuusvaste, test development, testauskehitys
