Development of frequency response measurement for micromechanical accelerometer

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Journal Title
Journal ISSN
Volume Title
School of Science | Master's thesis
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Date
2013
Major/Subject
Fysiikka
Mcode
Tfy-3
Degree programme
Language
fi
Pages
[7] + 61
Series
Description
Supervisor
Sillanpää, Mika
Thesis advisor
Partanen, Mikko
Keywords
MEMS, MEMS, accelerometer, kiihtyvyysanturi, frequency response, taajuusvaste, test development, testauskehitys
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Citation