Real-time HCl gas detection at parts-per-billion level concentrations utilising a diode laser and a bismuth-doped fibre amplifier
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2021-05
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Language
en
Pages
10
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Measurement Science and Technology, Volume 32, issue 5
Abstract
HCl measurements in a cleanroom environment are carried out using a cavity ring-down analyser in order to get an estimate of the HCl concentrations that can be expected to be present in semiconductor manufacturing. HCl is a reactive gas and the materials used for gas sampling and transportation have a significant effect on the measurement response time; hence, data on HCl adsorption to different materials is also provided. Finally, a light source operating at 1742 nm that can be used for HCl detection in a multi-gas analyser based on multipass photo-acoustic spectroscopy is presented. Preliminary results indicate that sub-ppb detection levels are achievable using this approach even for HCl.Description
Publisher Copyright: © 2021 The Author(s). Published by IOP Publishing Ltd. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
Keywords
bismuth, cleanroom, fibre, gas sensing, laser, photoacoustic spectroscopy
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Citation
Panu, H, Timo, R, Thomas, F, Makkonen, J, Alyshev, S, Kharakhordin, A & Firstov, S 2021, ' Real-time HCl gas detection at parts-per-billion level concentrations utilising a diode laser and a bismuth-doped fibre amplifier ', Measurement Science and Technology, vol. 32, no. 5, 055206 . https://doi.org/10.1088/1361-6501/abd651
