The Influence of Electrode Softness on the Sensitivity of Capacitive Pressure Sensors

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Kemiantekniikan korkeakoulu | Bachelor's thesis
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Date

2024-09-03

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CHEM3054

Degree programme

Aalto Bachelor's Programme in Science and Technology

Language

en

Pages

31+10

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Abstract

Capacitive pressure sensors serve an essential function in human motion detection, human-machine interfaces, healthcare monitoring, and soft robotics. These applications impose a wide working pressure range and necessitate an improvement in sensor sensitivity. To fulfill these requirements, the existing research extensively investigates the modifications of the dielectric layer. However, it neglects the influence of the mechanical properties of the electrode on stress absorption and stress transfer, which contribute to the sensitivity. Therefore, this thesis evaluates the performance of sensors whose electrodes vary in softness and porosity, in a pressure range of 0.1–100 kPa. The results show an average sensitivity improvement of 60% above 5 kPa with an optimized electrode softness and pore content. Thus, the study demonstrates a high dependence of sensor sensitivity on the electrode softness and favors porous electrode substrates, whose bulk shore hardness exceeds that of PDMS.

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Supervisor

Hummel, Michael

Thesis advisor

Basarir, Fevzihan

Keywords

capacitive pressure sensor, electrode softness, sensitivity, sensor performance

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https://urn.fi/URN:NBN:fi:aalto-202410086647

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[kand] Kemian tekniikan korkeakoulu / CHEM