Metalliliitostekniikat MEMS:ien integroinnissa

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Journal Title
Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu | Bachelor's thesis
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Date
2014-12-15
Department
Major/Subject
Elektroniikka
Mcode
S3027
Degree programme
Elektroniikka ja sähkötekniikka EST
Language
fi
Pages
46
Series
Description
Supervisor
Turunen, Markus
Thesis advisor
Rautiainen, Antti
Keywords
MEMS, metalliliitos, juottaminen, SLID, eutektinen, piisiru
Other note
Citation