Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers
Loading...
Access rights
openAccess
publishedVersion
URL
Journal Title
Journal ISSN
Volume Title
A4 Artikkeli konferenssijulkaisussa
This publication is imported from Aalto University research portal.
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
Date
Major/Subject
Mcode
Degree programme
Language
en
Pages
4
Series
Proceedings of the 41st European Photovoltaic Solar Energy Conference and Exhibition
Abstract
Ion implantation provides precise control over the resulting dopant atom density, enabling high-quality optical and electrical performance of nanostructured (black silicon, b-Si) emitters. In this work, we study how sensitive the performance of Al2O3-passivated b-Si emitters is to small variations in the implantation conditions and the equipment used to perform it. We carried out boron emitter implantations for identical nanostructured and planar wafers at four different implantation service providers and with both beam line and parallel beam tool configurations. We then benchmarked the results against the earlier optimised b-Si emitter process. The results show that there are some differences in obtained sheet resistance and emitter saturation current depending on the service provider and the used tool configuration. Finally, there are also some deviations in terms of possible bulk contamination among the different service providers.Description
Other note
Citation
Morozova, O, Chen, K, Radfar, B, Kentsch, U, Antwis, L, Savin, H & Vähänissi, V 2024, Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers. in Proceedings of the 41st European Photovoltaic Solar Energy Conference and Exhibition. EU PVSEC, European Photovoltaic Solar Energy Conference and Exhibition, Vienna, Austria, 23/09/2024. https://doi.org/10.4229/EUPVSEC2024/1CV.2.19