Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films

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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

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en

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ACS Omega, Volume 3, issue 1, pp. 1322-1328

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We report the direct and dry deposition of transparent conducting films (TCFs) of aerosol-synthesized single-walled carbon nanotubes (SWNTs) using a thermophoretic precipitator (TP) designed for the uniform and efficient deposition of aerosol-synthesized nanomaterials on 50 mm wafers or similarly sized polymer substrates. The optical and electrical performance of the fabricated TCFs match or surpass the published results achieved using a filter-based collection of aerosol-synthesized SWNTs, and TCFs with sheet resistances of 60 Ω/sq. at 87.8% transmittance and 199 Ω/sq. at 96% transmittance on flexible polymer substrates are demonstrated. The precipitator design is immediately applicable in roll-to-roll fabrication of SWNT TCFs or other functional coatings of aerosol-synthesized nanomaterials.

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Laiho, P, Rafiee, M, Liao, Y, Hussain, A, Ding, E & Kauppinen, E 2018, 'Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films', ACS Omega, vol. 3, no. 1, pp. 1322-1328. https://doi.org/10.1021/acsomega.7b01869