Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

Keywords

CVD grapheme, electrical mapping, large-scale grapheme, terahertz spectroscopy

DOI

10.1088/2053-1583/abdbcb

Citation

Whelan, P R, Zhou, B, Bezencenet, O, Shivayogimath, A, Mishra, N, Shen, Q, Jessen, B S, Pasternak, I, Mackenzie, D M A, Ji, J, Sun, C, Seneor, P, Dlubak, B, Luo, B, Østerberg, F W, Huang, D, Shi, H, Luo, D, Wang, M, Ruoff, R S, Conran, B R, McAleese, C, Huyghebaert, C, Brems, S, Booth, T J, Napal, I, Strupinski, W, Petersen, D H, Forti, S, Coletti, C, Jouvray, A, Teo, K B K, Centeno, A, Zurutuza, A, Legagneux, P, Jepsen, P U & Bøggild, P 2021, ' Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy ', 2D Materials, vol. 8, no. 2, 022003 . https://doi.org/10.1088/2053-1583/abdbcb

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https://urn.fi/URN:NBN:fi:aalto-202103222486

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[article-cris] Sähkötekniikan korkeakoulu / ELEC

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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

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