Cantilever-based photoacoustic sensor for terahertz range
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A4 Artikkeli konferenssijulkaisussa
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Date
2023
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en
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Proceedings of SPIE - The International Society for Optical Engineering
Abstract
Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.Description
Funding Information: We thank Gasera Ltd for designing the commercially available instrument parts employed in the experiments. This project is funded by the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN), Finland, decision number: 320167. The project is also a part of Universal Electromagnetic Radiation Detector (UNIDET) research project, which is funded by the Academy of Finland, Finland, (Project numbers 314363 and 314364). Publisher Copyright: © 2023 SPIE.
Keywords
damage threshold, flat spectral responsivity, linearity, Photoacoustic sensor, THz radiation detection
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Citation
Ikonen, E, Sharma, S, Ahmadi, M, Rossi, J, Vainio, M, Sun, Z & Steiger, A 2023, ' Cantilever-based photoacoustic sensor for terahertz range ', Proceedings of SPIE - The International Society for Optical Engineering . https://doi.org/10.1117/12.2647551