Physical mechanisms of boron diffusion gettering of iron in silicon
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Physica Status Solidi: Rapid Research Letters, Volume 4, issue 5-6, pp. 136-138
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Vähänissi, V, Haarahiltunen, A, Talvitie, H, Yli-Koski, M, Lindroos, J & Savin, H 2010, 'Physical mechanisms of boron diffusion gettering of iron in silicon', Physica Status Solidi: Rapid Research Letters, vol. 4, no. 5-6, pp. 136-138. https://doi.org/10.1002/pssr.201004105