Atomic layer deposition in macroscopic high aspect ratio structures: Development and modeling of experimental test method

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.advisorKalliomäki, Jesse
dc.contributor.advisorKing, Peter
dc.contributor.authorManninen, Ilkka
dc.contributor.schoolPerustieteiden korkeakoulufi
dc.contributor.supervisorLiljeroth, Peter
dc.date.accessioned2022-03-27T17:04:39Z
dc.date.available2022-03-27T17:04:39Z
dc.date.issued2022-03-22
dc.format.extent62+5
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/113671
dc.identifier.urnURN:NBN:fi:aalto-202203272553
dc.language.isoenen
dc.programmeMaster's Programme in Engineering Physicsfi
dc.programme.majorEngineering Physicsfi
dc.programme.mcodeSCI3056fi
dc.subject.keywordatomic layer depositionen
dc.subject.keywordALDen
dc.subject.keywordconformalityen
dc.subject.keywordaspect ratioen
dc.subject.keywordtrimethylaluminiumen
dc.subject.keywordaluminaen
dc.titleAtomic layer deposition in macroscopic high aspect ratio structures: Development and modeling of experimental test methoden
dc.titleAtomikerroskasvatus korkeissa rakennesuhteissa: testimenetelmän kehitys ja mallinnusfi
dc.typeG2 Pro gradu, diplomityöfi
dc.type.ontasotMaster's thesisen
dc.type.ontasotDiplomityöfi
local.aalto.electroniconlyyes
local.aalto.openaccessno

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