Atomic layer deposition in macroscopic high aspect ratio structures: Development and modeling of experimental test method
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Journal Title
Journal ISSN
Volume Title
Perustieteiden korkeakoulu |
Master's thesis
Authors
Date
Department
Major/Subject
Mcode
SCI3056
Degree programme
Language
en
Pages
62+5
Series
Description
Supervisor
Liljeroth, PeterThesis advisor
Kalliomäki, JesseKing, Peter