Optical AWG demultiplexer and microfabrication process development
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Helsinki University of Technology |
Licentiate thesis
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Instructions for the author
Authors
Date
2005
Department
Major/Subject
Metalli- ja materiaalioppi
Mcode
Mak-45
Degree programme
Language
en
Pages
vi + 89 s. + liitt. 6
Series
Description
Supervisor
Lehto, AriKeywords
AWG, WDM, SOI wafer, lithography, RIE etching