Molecular-dynamics simulation of the growth of diamondlike films by energetic carbon-atom beams
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© 1992 American Physical Society (APS). This is the accepted version of the following article: Kaukonen, H.-P. & Nieminen, Risto M. 1992. Molecular-dynamics simulation of the growth of diamondlike films by energetic carbon-atom beams. Physical Review Letters. Volume 68, Issue 5. 620-623. ISSN 0031-9007 (printed). DOI: 10.1103/physrevlett.68.620, which has been published in final form at http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.68.620.
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Authors
Date
1992
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Language
en
Pages
620-623
Series
Physical Review Letters, Volume 68, Issue 5
Abstract
The growth of diamondlike films and overlayers by the deposotion of energetic carbon atoms has been investigated by molecular-dynamics simulations. The interatomic many-atom potential suggested by Tersoff is used. The structurel analysis of the grown films shows that there is an energy window between 40 and 70 eV for the deposited atoms where the growth most closely results in dense diamondlike structure. This observation supports earlier experimental suggestions for optimal deposition conditions.Description
Keywords
energetic carbon atoms, diamondlike films, growth
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Citation
Kaukonen, H.-P. & Nieminen, Risto M. 1992. Molecular-dynamics simulation of the growth of diamondlike films by energetic carbon-atom beams. Physical Review Letters. Volume 68, Issue 5. 620-623. ISSN 0031-9007 (printed). DOI: 10.1103/physrevlett.68.620.