Defect distribution in a-plane GaN on Al2O3

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© 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the authors and the American Institute of Physics. The following article appeared in Applied Physics Letters, Volume 90, Issue 12 and may be found at http://scitation.aip.org/content/aip/journal/apl/90/12/10.1063/1.2715128.

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Journal Title

Journal ISSN

Volume Title

School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Date

2007

Major/Subject

Mcode

Degree programme

Language

en

Pages

121915/1-3

Series

Applied Physics Letters, Volume 90, Issue 12

Abstract

The authors studied the structural and point defect distributions of hydride vapor phase epitaxial GaN film grown in the [11−20] a direction on (1−102) r-plane sapphire with metal-organic vapor phase deposited a-GaN template using transmission electron microscopy, secondary ion mass spectrometry, and positron annihilation spectroscopy. Grown-in extended and point defects show constant behavior as a function of thickness, contrary to the strong nonuniform defect distribution observed in GaN grown along the [0001] direction. The observed differences are explained by orientation-dependent and kinetics related defect incorporation.

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Keywords

positron annihilation, TEM, SIMS, non-polar

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Citation

Tuomisto, Filip & Paskova, T. & Kröger, R. & Figge, S. & Hommel, D. & Monemar, B. & Kersting, R. 2007. Defect distribution in a-plane GaN on Al2O3. Applied Physics Letters. Volume 90, Issue 12. 121915/1-3. ISSN 0003-6951 (printed). DOI: 10.1063/1.2715128