Software Module for Laser Lithography

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Journal Title

Journal ISSN

Volume Title

Helsinki University of Technology | Diplomityö

Date

1993

Major/Subject

Fysiikka

Mcode

Tfy-3

Degree programme

Language

en

Pages

95

Series

Description

Supervisor

Tuomi, Turkka

Thesis advisor

Laiholuoto, Kari

Keywords

interpreter, tulkki, told, computer, tietokone, dator, graphics, grafiikka, grafik, mask / reticle, maski, mask, laser, laser, laser, litography, litografia, litografi

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Citation