Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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en
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4
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Chemical Communications, Volume 61, issue 5, pp. 917-920
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Thin-film deposition using sustainable precursors is required for various next-generation green energy applications. Here we report two atomic/molecular layer deposition processes for appreciably stable and conformal Ti-organic thin films and TiO2:organic superlattices with potential in e.g. battery, photocatalysis and thermoelectric applications. These processes are based on the safe and sustainable titanium isopropoxide as the titanium precursor.Description
| openaire: EC/HE/101097815/EU//UniEn-MLD
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Philip, A, Lone, U, Partanen, O, Haimi, E & Karppinen, M 2025, 'Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications', Chemical Communications, vol. 61, no. 5, pp. 917-920. https://doi.org/10.1039/d4cc05425c