A low-power sensor front-end for a three-axis capacitive micro-accelerometer

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Helsinki University of Technology | Licentiate thesis
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Authors

Kämäräinen, Mika

Date

2007

Major/Subject

Piiritekniikka

Mcode

S-87

Degree programme

Language

en

Pages

70

Series

Description

Supervisor

Halonen, Kari

Thesis advisor

Aaltonen, Lasse

Keywords

three-axis capacitive accelerometer, kolmiakselinen kapasitiivinen kiihtyvyysanturi, sensor interface, anturinrajapinta, sensor front-end, anturietuaste, low-power circuit, matalatehonkulutuksinen piiri, electrostatic forces, sähköstaattiset voimat

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