Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Journal of Applied Physics, Volume 117, issue 24, pp. 245304-1-245304-9
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Broas, M, Liu, X, Ge, Y, Mattila, T T & Paulasto-Kröckel, M 2015, 'Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices', Journal of Applied Physics, vol. 117, no. 24, pp. 245304-1-245304-9. https://doi.org/10.1063/1.4923025