Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2015
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en
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245304-1-245304-9
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JOURNAL OF APPLIED PHYSICS, Volume 117, issue 24
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Broas , M , Liu , X , Ge , Y , Mattila , T T & Paulasto-Kröckel , M 2015 , ' Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices ' , Journal of Applied Physics , vol. 117 , no. 24 , pp. 245304-1-245304-9 . https://doi.org/10.1063/1.4923025