Atomikerroskasvatuksen optimointi optisten interferenssisuodattimien valmistuksessa
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Journal Title
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Volume Title
Helsinki University of Technology |
Diplomityö
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Instructions for the author
Authors
Date
2002
Department
Major/Subject
Optoelektroniikka
Mcode
S-104
Degree programme
Language
fi
Pages
71
Series
Description
Supervisor
Tuomi, TurkkaThesis advisor
Törnqvist, RunarKeywords
thin-film interference filters, ohutkalvo-interferenssisuodattimet, atomic layer deposition, atomikerroskasvatus, ALD-reactor, ALD-reaktori, ALD-cycle, ALD-sykli