Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

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Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2015
Department
Department of Materials Science and Engineering
Department of Micro and Nanosciences
Department of Chemistry and Materials Science
Department of Chemical and Metallurgical Engineering
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Mcode
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Language
en
Pages
01
Series
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 33, issue 1
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DOI
10.1116/1.4893769
Citation
Berdova, M, Ylivaara, O M E, Rontu, V, Törmä, P T, Puurunen, R & Franssila, S 2015, ' Fracture properties of atomic layer deposited aluminum oxide free-standing membranes ', JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, vol. 33, no. 1 . https://doi.org/10.1116/1.4893769
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https://urn.fi/URN:NBN:fi:aalto-201609163872
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[article-cris] Kemian tekniikan korkeakoulu / CHEM