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Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Authors
Berdova, Maria
Ylivaara, Oili M. E.
Rontu, Ville
Törmä, Pekka T.
Puurunen, Riikka
Franssila, Sami
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en
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5
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Journal of Vacuum Science & Technology A, Volume 33, issue 1
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Berdova, M, Ylivaara, O M E, Rontu, V, Törmä, P T, Puurunen, R & Franssila, S 2015, 'Fracture properties of atomic layer deposited aluminum oxide free-standing membranes', Journal of Vacuum Science & Technology A, vol. 33, no. 1. https://doi.org/10.1116/1.4893769