Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorKhanna, Amiten_US
dc.contributor.authorSubramanian, Ananthen_US
dc.contributor.authorHäyrinen, Markusen_US
dc.contributor.authorSelvaraja, Shankaren_US
dc.contributor.authorVerheyen, Peteren_US
dc.contributor.authorVan Thourhout, Driesen_US
dc.contributor.authorHonkanen, Seppoen_US
dc.contributor.authorLipsanen, Harrien_US
dc.contributor.authorBaets, Roelen_US
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.groupauthorHarri Lipsanen Groupen
dc.date.accessioned2018-08-01T12:39:37Z
dc.date.available2018-08-01T12:39:37Z
dc.date.issued2014en_US
dc.description.versionPeer revieweden
dc.format.extent9
dc.format.extent5684-5692
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationKhanna, A, Subramanian, A, Häyrinen, M, Selvaraja, S, Verheyen, P, Van Thourhout, D, Honkanen, S, Lipsanen, H & Baets, R 2014, ' Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths ', Optics Express, vol. 22, no. 5, pp. 5684-5692 . https://doi.org/10.1364/OE.22.005684en
dc.identifier.doi10.1364/OE.22.005684en_US
dc.identifier.issn1094-4087
dc.identifier.otherPURE UUID: 28712a8f-22db-4f02-8ffe-81f061196a5cen_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/28712a8f-22db-4f02-8ffe-81f061196a5cen_US
dc.identifier.otherPURE LINK: http://dx.doi.org/10.1364/OE.22.005684en_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/26755811/oe_22_5_5684.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/32704
dc.identifier.urnURN:NBN:fi:aalto-201808014104
dc.language.isoenen
dc.relation.ispartofseriesOPTICS EXPRESSen
dc.relation.ispartofseriesVolume 22, issue 5en
dc.rightsopenAccessen
dc.titleImpact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengthsen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion

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