Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Optics Express, Volume 22, issue 5, pp. 5684-5692
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Khanna, A, Subramanian, A, Häyrinen, M, Selvaraja, S, Verheyen, P, Van Thourhout, D, Honkanen, S, Lipsanen, H & Baets, R 2014, 'Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths', Optics Express, vol. 22, no. 5, pp. 5684-5692. https://doi.org/10.1364/OE.22.005684