Mekaanisen resonaattorin toteuttaminen MHz-alueelle SOI-teknologialla
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Journal Title
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Volume Title
Helsinki University of Technology |
Diplomityö
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Authors
Date
2002
Department
Major/Subject
Mittaustekniikka
Mcode
S-108
Degree programme
Language
fi
Pages
73
Series
Description
Supervisor
Tittonen, IlkkaThesis advisor
Mattila, TomiOja, Aarne
Keywords
micromechanics, mikromekaniikka, resonator, resonaattori, SOI, SOI, bias-voltage, bias-jännite, RF-MEMS, RF-MEMS