Mekaanisen resonaattorin toteuttaminen MHz-alueelle SOI-teknologialla
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Helsinki University of Technology |
Diplomityö
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Authors
Date
Department
Major/Subject
Mcode
S-108
Degree programme
Language
fi
Pages
73
Series
Description
Supervisor
Tittonen, IlkkaThesis advisor
Mattila, TomiOja, Aarne