Järjestelmä mikromekaanisten piianturien dimensioiden mittaamiseen optisesti
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Journal Title
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Helsinki University of Technology |
Diplomityö
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Instructions for the author
Authors
Date
1992
Department
Major/Subject
Mittaustekniikka
Mcode
Ele-66a
Degree programme
Language
fi
Pages
45
Series
Description
Supervisor
Wallin, PekkaThesis advisor
Kuisma, HeikkiKeywords
autofocus, autofokus, optical measuring, optinen mittaaminen, thickness measurement, paksuusmittaus, depth profile, profiili