Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorLipiäinen, Lauri
dc.contributor.authorKokkonen, Kimmo
dc.contributor.authorKaivola, Matti
dc.contributor.departmentTeknillisen fysiikan laitosfi
dc.contributor.departmentDepartment of Applied Physicsen
dc.contributor.schoolPerustieteiden korkeakoulufi
dc.contributor.schoolSchool of Scienceen
dc.date.accessioned2015-04-28T09:43:44Z
dc.date.available2015-04-28T09:43:44Z
dc.date.issued2010
dc.description.abstractA detection scheme for obtaining phase and absolute amplitude information of surface vibrations on microacoustic components using homodyne laser interferometry is described. The scheme does not require active stabilization of the optical path length of the interferometer. The detection setup is realized in a homodyneMichelson interferometer configuration, and selected measurements on a 374 MHz surface acoustic wave fan-shaped filter and two different piezoelectrically actuated micromechanical resonators are presented to demonstrate the performance of the instrument. With the current detection electronics, the interferometer is capable of detecting out-of-plane surface vibrations up to 2 GHz with a lateral resolution of better than 1 μm and with a minimum detectable vibration amplitude of ∼1 pm.en
dc.description.versionPeer revieweden
dc.format.extent114510
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLipiäinen, Lauri & Kokkonen, Kimmo & Kaivola, Matti. 2010. Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization. Journal of Applied Physics. Volume 108, Issue 11. 114510. ISSN 1089-7550 (electronic). ISSN 0021-8979 (printed). DOI: 10.1063/1.3504636.en
dc.identifier.doi10.1063/1.3504636
dc.identifier.issn1089-7550 (electronic)
dc.identifier.issn0021-8979 (printed)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/15786
dc.identifier.urnURN:NBN:fi:aalto-201504272447
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.ispartofseriesJournal of Applied Physicsen
dc.relation.ispartofseriesVolume 108, Issue 11
dc.rights© 2010 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/japen
dc.rights.holderAmerican Intitute of Physics (AIP)
dc.subject.keywordsurface vibrationsen
dc.subject.keywordmicroacoustic componentsen
dc.subject.keywordhomodyne laser interferometryen
dc.subject.keyworddetection methodsen
dc.subject.keywordabsolute amplitudeen
dc.subject.keywordhomodyne interferometeren
dc.subject.otherPhysicsen
dc.titlePhase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilizationen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.dcmitypetexten
dc.type.versionFinal published versionen
Files
Original bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
A1_lipiäinen_lauri_2010.pdf
Size:
1.31 MB
Format:
Adobe Portable Document Format