Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization

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Journal Title
Journal ISSN
Volume Title
School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2010
Major/Subject
Mcode
Degree programme
Language
en
Pages
114510
Series
Journal of Applied Physics, Volume 108, Issue 11
Abstract
A detection scheme for obtaining phase and absolute amplitude information of surface vibrations on microacoustic components using homodyne laser interferometry is described. The scheme does not require active stabilization of the optical path length of the interferometer. The detection setup is realized in a homodyneMichelson interferometer configuration, and selected measurements on a 374 MHz surface acoustic wave fan-shaped filter and two different piezoelectrically actuated micromechanical resonators are presented to demonstrate the performance of the instrument. With the current detection electronics, the interferometer is capable of detecting out-of-plane surface vibrations up to 2 GHz with a lateral resolution of better than 1 μm and with a minimum detectable vibration amplitude of ∼1 pm.
Description
Keywords
surface vibrations, microacoustic components, homodyne laser interferometry, detection methods, absolute amplitude, homodyne interferometer
Other note
Citation
Lipiäinen, Lauri & Kokkonen, Kimmo & Kaivola, Matti. 2010. Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization. Journal of Applied Physics. Volume 108, Issue 11. 114510. ISSN 1089-7550 (electronic). ISSN 0021-8979 (printed). DOI: 10.1063/1.3504636.