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Epitaksiaalisten oksidiohutkalvojen kasvatus piille atomikerroskasvatusmenetelmällä
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Volume Title
Helsinki University of Technology |
Master's thesis
Electronic archive copy is available via Aalto Thesis Database.
Checking the digitized thesis and permission for publishing
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Date
Department
Major/Subject
Mcode
Kem-35
Degree programme
Language
fi
Pages
ix + 83
Series
Description
Supervisor
Niinistö, LauriThesis advisor
Nieminen, MinnaPutkonen, Matti