Growth and characterization of Si/SiOx structures
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Helsinki University of Technology |
Diplomityö
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Instructions for the author
Authors
Date
2003
Department
Kemian tekniikan osasto
Major/Subject
Epäorgaaninen kemia
Mcode
Kem-35
Degree programme
Language
en
Pages
58
Series
Description
Supervisor
Niinistö, LauriThesis advisor
Sinkkonen, JuhaNorikov, Sergei
Keywords
silicon epitaxy on oxide, piin epitaksinen kasvatus oksidille, MBE, SOI