Inorganic-organic superlattice thin films by atomic/molecular layer deposition

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openAccess

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A3 Kirjan tai muun kokoomateoksen osa

Date

2015

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Degree programme

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en

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159-179

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Oxide Thin Films, Multilayers, and Nanocomposites, Part III

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Tynell , T & Karppinen , M 2015 , Inorganic-organic superlattice thin films by atomic/molecular layer deposition . in S A P.Mele & T T C.Li (eds) , Oxide Thin Films, Multilayers, and Nanocomposites, Part III . pp. 159-179 . https://doi.org/10.1007/978-3-319-14478-8