Inorganic-organic superlattice thin films by atomic/molecular layer deposition
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A3 Kirjan tai muun kokoomateoksen osa
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| openaire: EC/FP7/339478/EU//LAYERENG-HYBMAT
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Tynell, T & Karppinen, M 2015, Inorganic-organic superlattice thin films by atomic/molecular layer deposition. in S A P.Mele & T T C.Li (eds), Oxide Thin Films, Multilayers, and Nanocomposites, Part III. pp. 159-179. https://doi.org/10.1007/978-3-319-14478-8